Who Benefits

The M Series desktop XRF is best suited to customers who have:

• Small parts/features such as those found in semiconductors, connectors, or PCBs
• Requirement to test many samples or locations per new lot of material
• Very thin coatings (<100 nm)
• Very short measurement times (1-5 seconds)
• The need to meet the requirements of IPC-4552A

Key Features

The M Series is the ultimate in high performance at the absolute smallest x-ray spot sizes. The poly-capillary optics can focus the x-ray beam down to 15μm FWHM. A dual-camera system allows operators to see an entire part and zoom in with the high-mag camera to pinpoint the feature to be measured. The programmable X-Y stage can precisely select and measure multiple points, or the pattern recognition software can do this automatically. A 2-D mapping system can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.

Configuration

The standard configuration includes 15μm optics, a programmable X-Y sample stage, and a high resolution SDD detector to process the higher count rates. The micro/macro camera system has one camera with 150x magnification with a higher digital zoom. The optics system has a very close focal distance, so samples measured with the M Series must be flat.

Specifications